JPS6190242U - - Google Patents
Info
- Publication number
- JPS6190242U JPS6190242U JP17426484U JP17426484U JPS6190242U JP S6190242 U JPS6190242 U JP S6190242U JP 17426484 U JP17426484 U JP 17426484U JP 17426484 U JP17426484 U JP 17426484U JP S6190242 U JPS6190242 U JP S6190242U
- Authority
- JP
- Japan
- Prior art keywords
- ultrasonic
- sound pressure
- jig
- detection signal
- wafer surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 claims description 2
- 239000003960 organic solvent Substances 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims description 2
- 238000001514 detection method Methods 0.000 claims 2
- 238000009530 blood pressure measurement Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 4
- 238000002604 ultrasonography Methods 0.000 description 2
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17426484U JPS6190242U (en]) | 1984-11-19 | 1984-11-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17426484U JPS6190242U (en]) | 1984-11-19 | 1984-11-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6190242U true JPS6190242U (en]) | 1986-06-12 |
Family
ID=30731890
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17426484U Pending JPS6190242U (en]) | 1984-11-19 | 1984-11-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6190242U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0947733A (ja) * | 1995-08-03 | 1997-02-18 | Kokusai Denki L Tec:Kk | 超音波洗浄装置 |
-
1984
- 1984-11-19 JP JP17426484U patent/JPS6190242U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0947733A (ja) * | 1995-08-03 | 1997-02-18 | Kokusai Denki L Tec:Kk | 超音波洗浄装置 |
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